Micro Line Width Measurement System 'LW-3200/MT-3200'
Easy to attach to your microscope, system upgrade! Various edge detection specifications are possible.
The "LW-3200/MT-3200" is a system that can measure the linewidth of semiconductor wafers and liquid crystal color resist with a repeatability precision of 3σ = 10nm. Depending on the type of line, such as negative, positive, inside, or outside, various edge detection specifications can be set. Inclined lines can also be measured perpendicularly to the detected line. Additionally, it can be combined with easy operation and high-precision autofocus as an option. *Please note that there may be a certain period required for delivery. 【Features】 ■ Measurement with a repeatability precision of 3σ = 10nm ■ Various edge detection specifications available according to the type of line ■ Inclined lines can be measured perpendicularly to the detected line ■ Can be combined with easy operation and high-precision autofocus (optional) *For more details, please refer to the PDF document or feel free to contact us.
- Company：フローベル
- Price：Other
